Heated substrate support structure

Details Heated substrate support structure Heated substrate support structure

1996-04-19

1998-12-01

Jeffery, John M.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219410, 392418, F27B 514, F28F 700

Patent

active

058442057

ABSTRACT:
A heated substrate support plate for use in a process chamber. The support plate has grooves disposed therein for receiving heating elements. The heating elements are comprised of an outer sheath, a heater coil and a heat-conducting filler material. The heating element is disposed within a groove and compressed to compact the heat-conducting filler material about the heater coil.

REFERENCES:
patent: 5033538 (1991-07-01), Wagner et al.
patent: 5059770 (1991-10-01), Mahawili
patent: 5180000 (1993-01-01), Wagner et al.
patent: 5238499 (1993-08-01), Van De Ven
patent: 5511608 (1996-04-01), Boyd
patent: 5516367 (1996-05-01), Lei et al.
patent: 5595241 (1997-01-01), Jelinek

Affiliated with

Also associated with

Rating

Heated substrate support structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heated substrate support structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heated substrate support structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2397328