Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Reexamination Certificate
2005-08-23
2005-08-23
Verbitsky, Gail (Department: 2859)
Thermal measuring and testing
Temperature measurement
By electrical or magnetic heat sensor
C374S142000, C374S164000, C136S225000, C136S233000, C073S105000
Reexamination Certificate
active
06932504
ABSTRACT:
A self-detecting type cantilever for an atomic force microscope (AFM) has an electro-flexural conversion element for converting a flexural amount of the cantilever into an electric current or voltage, a temperature measurement element disposed at a front end portion of the cantilever for measuring a temperature, and a heating element disposed at the front end portion of the cantilever for heating the temperature measurement element. The temperature measurement element and the heating element are superposed with each other on a main face of the cantilever via an electrical insulating layer. As a result, even if the amount of electric energy supplied to the heating element is reduced, it is possible to effectively supply an amount of heat necessary for measurement to the temperature measurement element. Therefore, by minimizing the heat to be supplied to a sample and the cantilever, the respondency of measurement is improved and temperature measurement can be performed with a high degree of accuracy.
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Arai Tadashi
Shirakawabe Yoshiharu
Takahashi Hiroshi
Adams & Wilks
Pruchnic Jr. Stanley J.
SII NanoTechnology Inc.
Verbitsky Gail
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