Heatable hollow semiconductor

Details Heatable hollow semiconductor Heatable hollow semiconductor

1974-12-09

1976-06-08

Goldberg, E. A.

Electrical resistors

Miscellaneous

118 49, 219390, 428 36, 428398, H01C 1300

Patent

active

039626709

ABSTRACT:
Hollow semiconductor bodies having an outer surface composed of a doped semiconductor material and an inner surface composed of a pure semiconductor material are formed by sequential deposition from a gaseous thermally decomposable semiconductor compound onto a heated carrier member. The multi-layer hollow semiconductor bodies are directly heatable during diffusion of dopants into semiconductor elements.

REFERENCES:
patent: 3776809 (1973-12-01), Baumler
patent: 3823685 (1973-10-01), Koepp

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