Heat treatment system and method therefore

Details Heat treatment system and method therefore Heat treatment system and method therefore

2007-02-13

2010-10-26

Wilson, Gregory A (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

C432S258000, C118S728000

Reexamination Certificate

active

07819658

ABSTRACT:
Disclosed herein is a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment. In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box closed by an opening/closing lid, in a treating-object transfer area via an opening, which is formed in a partition wall26separating a housing-box transfer area for transferring the treating-object housing box from the treating-object transfer area46in an atmosphere of an inert gas, to carry out a predetermined treatment, a standby box transfer means is provided in the housing-box transfer area for holding a treating-object housing box, which houses therein the next object to be carried in the treating-object transfer area, in the vicinity of the opening to cause the treating-object housing box to stand by.

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