Heat treatment system and a method for cooling a loading...

Heating – Accessory means for holding – shielding or supporting work...

Reexamination Certificate

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Details

C432S258000, C432S259000, C414S935000, C248S346010, C248S346040, C248S346060, C248S346070, C269S071000, C269S903000

Reexamination Certificate

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10939432

ABSTRACT:
There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment.In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box2closed by an opening/closing lid10, in a treating-object transfer area46via an opening28, which is formed in a partition wall26separating a housing-box transfer area44for transferring the treating-object housing box from the treating-object transfer area46in an atmosphere of an inert gas, to carry out a predetermined treatment, a standby box transfer means60is provided in the housing-box transfer area for holding a treating-object housing box, which houses therein the next object to be carried in the treating-object transfer area, in the vicinity of the opening to cause the treating-object housing box to stand by. Thus, when the object to be treated is carried in via the opening of the partition wall, which separates the housing-box transfer area from the treating-object transfer area (wafer transfer area), to carry out a predetermined treatment, the structure of various mechanisms in the vicinity of the opening is simplified, and the space is saved.

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