Heating – Accessory means for holding – shielding or supporting work...
Reexamination Certificate
2007-05-01
2007-05-01
Lu, Jiping (Department: 3749)
Heating
Accessory means for holding, shielding or supporting work...
C432S258000, C432S259000, C414S935000, C248S346010, C248S346040, C248S346060, C248S346070, C269S071000, C269S903000
Reexamination Certificate
active
10939432
ABSTRACT:
There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment.In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box2closed by an opening/closing lid10, in a treating-object transfer area46via an opening28, which is formed in a partition wall26separating a housing-box transfer area44for transferring the treating-object housing box from the treating-object transfer area46in an atmosphere of an inert gas, to carry out a predetermined treatment, a standby box transfer means60is provided in the housing-box transfer area for holding a treating-object housing box, which houses therein the next object to be carried in the treating-object transfer area, in the vicinity of the opening to cause the treating-object housing box to stand by. Thus, when the object to be treated is carried in via the opening of the partition wall, which separates the housing-box transfer area from the treating-object transfer area (wafer transfer area), to carry out a predetermined treatment, the structure of various mechanisms in the vicinity of the opening is simplified, and the space is saved.
REFERENCES:
patent: 5236181 (1993-08-01), Ishii et al.
patent: 5261935 (1993-11-01), Ishii et al.
patent: 5269643 (1993-12-01), Kodama et al.
patent: 5407181 (1995-04-01), Ohsawa
patent: 5514196 (1996-05-01), Tanahashi et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5697749 (1997-12-01), Iwabuchi et al.
patent: 5829939 (1998-11-01), Iwai et al.
patent: 5846073 (1998-12-01), Weaver
patent: 5915957 (1999-06-01), Tanigawa
patent: 6079927 (2000-06-01), Muka
patent: 6222161 (2001-04-01), Shirakawa et al.
patent: 6231290 (2001-05-01), Kikuchi et al.
patent: 6247245 (2001-06-01), Ishii
patent: 6419482 (2002-07-01), Sakata et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 2001/0005476 (2001-06-01), Kikuchi et al.
patent: 1 195 807 (2002-04-01), None
patent: 2 284 706 (1995-06-01), None
patent: 03268493 (1991-11-01), None
patent: 5-21581 (1993-01-01), None
patent: 06-224144 (1994-08-01), None
patent: 06-318553 (1994-11-01), None
patent: 06-349749 (1994-12-01), None
patent: 11-163095 (1999-06-01), None
patent: 11-260747 (1999-09-01), None
patent: 11-274267 (1999-10-01), None
patent: 11-284044 (1999-10-01), None
patent: 11-297792 (1999-10-01), None
patent: 11-329989 (1999-11-01), None
patent: 2000-150400 (2000-05-01), None
patent: 2000-353665 (2000-12-01), None
patent: WO 99/02436 (1999-01-01), None
patent: WO 99/54921 (1999-10-01), None
European Search Report, mailed Dec. 27, 2005 issued in connection with EP 01 20 3171.
JPO Action (Notification of Reason for Rejection) dated Nov. 1, 2005 with English translation.
European Search Report, mailed Dec. 28, 2006 issued in connection with EP 06 07 6596.
Akimoto Motoki
Mochizuki Shinya
Lu Jiping
Smith , Gambrell & Russell, LLP
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