Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1996-06-12
1997-10-21
Bennett, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432 5, 432 6, 432253, F27D 312
Patent
active
056789890
ABSTRACT:
An object holder is raised, a mount portion is stopped at a middle stop position higher than a lower stop position, and an object of treatment is preheated. Thereafter, the object holder is further raised, the mount portion is stopped at an upper stop position in a processing tube higher than the middle position, and the object is heat-treated. A first temperature sensor for measuring a temperature on the obverse side of the object on the mount portion is located opposite the obverse side. A second temperature sensor for measuring a temperature on the reverse side of the object on the mount portion is located opposite the reverse side. The temperature of the object is detected in accordance with the respective outputs of the first and second temperature sensors. A secondary heat source is provided such that it emits secondary radiant heat rays toward the reverse of the object in a treatment position when it is heated by means of a primary heat source in the processing tube, thereby heating at least the peripheral edge portion of the object.
REFERENCES:
patent: 4857689 (1989-08-01), Lee
patent: 5000682 (1991-03-01), Heidt et al.
patent: 5001327 (1991-03-01), Hirasawa et al.
patent: 5148714 (1992-09-01), McDiarmid
patent: 5249960 (1993-10-01), Monoe
patent: 5360336 (1994-11-01), Monoe
Bennett Henry A.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
Wilson Gregory A.
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