Coating processes – Centrifugal force utilized
Reexamination Certificate
2005-12-27
2005-12-27
Jolley, Kirsten (Department: 1762)
Coating processes
Centrifugal force utilized
C427S374100, C427S377000, C427S385500, C118S052000, C438S758000, C438S780000
Reexamination Certificate
active
06979474
ABSTRACT:
When a substrate coated with a coating solution which oxidizes at high temperatures is heat-treated, an oxygen concentration of a treatment atmosphere is lowered when the temperature is low. Next, the substrate is heat-treated in the treatment atmosphere of which the oxygen concentration is lowered. Sequentially, the treatment atmosphere is returned to that with the original oxygen concentration after the passage of a predetermined time after completing the heat treatment. Thereby, the substrate can be heat-treated, with the oxidization of the coating solution being controlled.
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Matsuyama Yuji
Mizutani Yoji
Nagashima Shinji
Yonemizu Akira
Jolley Kirsten
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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