Heat treatment method, heat treatment apparatus and...

Coating processes – Centrifugal force utilized

Reexamination Certificate

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C427S374100, C427S377000, C427S385500, C118S052000, C438S758000, C438S780000

Reexamination Certificate

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06979474

ABSTRACT:
When a substrate coated with a coating solution which oxidizes at high temperatures is heat-treated, an oxygen concentration of a treatment atmosphere is lowered when the temperature is low. Next, the substrate is heat-treated in the treatment atmosphere of which the oxygen concentration is lowered. Sequentially, the treatment atmosphere is returned to that with the original oxygen concentration after the passage of a predetermined time after completing the heat treatment. Thereby, the substrate can be heat-treated, with the oxidization of the coating solution being controlled.

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patent: 6066574 (2000-05-01), You et al.
patent: 6090212 (2000-07-01), Mahawili
patent: 6423651 (2002-07-01), Nakano et al.

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