Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-12-13
2005-12-13
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C029S025010, C219S390000
Reexamination Certificate
active
06975917
ABSTRACT:
A thermal processing method selects a batch size range including the number of workpieces to be processed from a plurality of batch size ranges including batch size ranges in which reference numbers smaller than the holding capacity of a workpiece holder are maximums. The workpieces are distributed in the workpiece holder on the basis of the workpiece distribution pattern determined corresponding to the specified batch size range. Processing conditions of the thermal process are determined according to the workpiece distribution pattern. A thermal processing apparatus comprises a controller capable of carrying out the thermal processing method.
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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP2002/007974.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338).
Kawamura Kazuhiro
Sakamoto Koichi
Takenaga Yuichi
Yokota Takashi
Garland Steven R.
Picard Leo
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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