Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1995-03-23
1997-07-08
Bennett, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432253, F23D 1144
Patent
active
056454198
ABSTRACT:
A heat treatment device including a handling chamber that has a carriers feed in/out opening for carriers holding plural sheets of objects to be treated parallelly vertical, a vertical heat treatment furnace for heat treating the objects and a posture changer for swinging the carriers near the carriers feed in/out opening of the handling chamber on a rotational center into a territory of lower sides of the carriers to change the posture of the objects to be treated from the vertical position to the horizontal position. The heat treatment device also has a carriers storage unit disposed above the posture changing means for storing a plural number of posture changed carriers, conveying device for conveying the carriers between the storage unit and the posture changing device and the heat treatment furnace side. Also, provided is a transferrer for transferring the objects-to-be-treated to/from an objects-to-be-treated holder for loading and unloading into/out of the heat treatment furnace side. The posture changer swings the carriers on the rotational center to sides of the carriers to change the carriers' posture from vertical to horizontal so the carriers have postures changed along a swing track of a minimum radius with small bulge amounts and a minimum moving amount. Thus, a conveying distance and a conveying time for conveying the posture changed carriers to the upper storage unit be reduced, and the heat treatment device can be smaller-sized and have improved processing efficiency.
REFERENCES:
patent: 5110248 (1992-05-01), Asano et al.
patent: 5181819 (1993-01-01), Sakata et al.
patent: 5219464 (1993-06-01), Yamaga et al.
patent: 5261167 (1993-11-01), Sakata
Haraoka Tsutomu
Iwai Hiroyuki
Kikuchi Hisashi
Nakao Ken
Ohsawa Tetsu
Bennett Henry A.
Lu Jiping
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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