Heat treatment jig for semiconductor silicon substrate

Details Heat treatment jig for semiconductor silicon substrate Heat treatment jig for semiconductor silicon substrate

2006-08-11

2008-10-28

Wilson, Gregory A (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

C432S258000, C211S041180

Reexamination Certificate

active

07442038

ABSTRACT:
This invention provides a heat treatment jig for semiconductor silicon substrates, which, in respective heat treatment of hydrogen annealing or argon annealing, can handle enlargement of the diameter of wafers to be treated and can also prevent slipping and dislocations that occur as a result of the stress caused by the weight of the wafer itself or the deflection of the heat treatment jig itself.

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