Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1990-12-05
1992-05-19
Reynolds, Bruce A.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219405, 219411, 219522, 392408, 392416, 432121, 118725, F27B 514
Patent
active
051151189
ABSTRACT:
A heat-treatment furnace comprising a process tube for containing an object of treatment, a heater surrounding the process tube, and an infrared impermeable member located on the process tube side of the heater and at least one the side of an open end of the process tube through which the object of treatment is carried in and out.
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patent: 4849608 (1989-07-01), Muraoka et al.
patent: 4950870 (1990-08-01), Mitsuhashi et al.
patent: 4954685 (1990-09-01), Kumagai et al.
Harada Hiromi
Nozawa Toshihisa
Hoang Tu
Reynolds Bruce A.
Tokyo Electron Limited
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