Heat treatment device and heat treatment method

Details Heat treatment device and heat treatment method Heat treatment device and heat treatment method

2006-06-13

2006-06-13

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000

Reexamination Certificate

active

07060944

ABSTRACT:
A heat treatment apparatus (100) having: a susceptor (2) rotatably provided in a heat treatment vessel (1), on which a wafer (W) is placed; a preheat ring (3) surrounding a periphery of the susceptor (2) to be close to and in non-contact with the susceptor, which is supported by a base (4) provided in the heat treatment vessel (1); and a heating apparatus (8) for heating a wafer (W) placed on the susceptor (2), wherein the preheat ring (3) is formed such that an inner peripheral center (31a) is eccentric to an outer periphery (32). The preheat ring (3) is moved around the susceptor (2); the preheat ring (3) is positioned to minimize a distance between the inner peripheral center (31a) of the preheat ring (3) and the center (2b) of the susceptor (2); and thereafter a heat treatment is performed to a wafer (W).

REFERENCES:
patent: 5421957 (1995-06-01), Carlson et al.
patent: 6022587 (2000-02-01), Hey et al.
patent: 6153260 (2000-11-01), Comita et al.
patent: 6489241 (2002-12-01), Thilderkvist et al.

Affiliated with

Also associated with

Rating

Heat treatment device and heat treatment method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat treatment device and heat treatment method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treatment device and heat treatment method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3620284