Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2006-06-27
2006-06-27
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
07068926
ABSTRACT:
After the maintenance of a heat treatment apparatus, a susceptor and a heating plate are moved upwardly and a nitrogen gas flow from an inlet toward an outlet passage is produced prior to heat treating a semiconductor wafer. In this state, flash lamps are turned on to cause momentary expansion and contraction of the gas in a chamber, thereby scattering particles deposited on a bottom plate, etc. The scattered particles are removed by the nitrogen gas passing through a bottom portion of the chamber and discharged through the outlet passage. The particles are easily removed due to the flash lamps being turned on a predetermined number of times at fixed time intervals while folowing the nitrogen gas. The heat treatment apparatus has a light-emission characteristic and easily removes the particles in the chamber.
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Dainippon Screen Mfg. Co,. Ltd.
Fuqua Shawntina
Ostrolenk Faber Gerb & Soffen, LLP
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