Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2008-07-31
2011-11-01
Campbell, Thor (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S407000
Reexamination Certificate
active
08050546
ABSTRACT:
A capacitor, a coil, a flash lamp, and a switching element such as an IGBT are connected in series. A controller outputs a pulse signal to the gate of the switching element. A waveform setter sets the waveform of the pulse signal, based on the contents of input from an input unit. With electrical charge accumulated in the capacitor, a pulse signal is output to the gate of the switching element so that the flash lamp emits light intermittently. A change in the waveform of the pulse signal applied to the switching element will change the waveform of current flowing through the flash lamp and, accordingly, the form of light emission, thereby resulting in a change in the temperature profile for a semiconductor wafer.
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Chinese Office Action dated Dec. 25, 2009 in corresponding Chinese Patent Application No. 2008-102134537.
English translation of Chinese Office Action dated Dec. 25, 2009 in corresponding Chinese Patent Application No. 2008-102134537.
Untranslated Office Action issued by Korean Patent Office on Jul. 22, 2010 in connection with corresponding Korean application No. 10-2008-0088072.
Japanese translation of Korean Office Action issued Jul. 22, 2010 in connection with corresponding Korean application prepared by Japanese Associate.
English translation of Korean Office Action based on Japanese translation prepared by Korean attorney.
Campbell Thor
Dainippon Screen Mfg. Co,. Ltd.
Ostrolenk Faber LLP
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