Heat treatment apparatus, heat treatment method, and...

Details Heat treatment apparatus, heat treatment method, and... Heat treatment apparatus, heat treatment method, and...

2007-01-24

2009-12-08

Wilson, Gregory A (Department: 3749)

Heating

Heating or heat retaining work chamber structure

C118S729000

Reexamination Certificate

active

07628612

ABSTRACT:
In the present invention, a plurality of heat treatment units are arranged side by side in a linear form and a substrate transfer mechanism for transferring the substrate between the heat treatment units is provided in a heat treatment apparatus. The substrate is sequentially heat-treated in the arrangement order, whereby one heat treatment as a whole is dividedly and successively performed in the plurality of heat treatment units. This allows substrates to be heat-treated along the same route and uniforms the thermal history among the substrates. At the time when heat-treating a plurality of substrates, the present invention causes less variation in thermal history among the substrates as compared to the case of parallel heat treatments.

REFERENCES:
patent: 5202716 (1993-04-01), Tateyama et al.
patent: 6024502 (2000-02-01), Akimoto et al.
patent: 6168667 (2001-01-01), Yoshioka
patent: 6264748 (2001-07-01), Kuriki et al.
patent: 6451515 (2002-09-01), Takamori et al.
patent: 6467976 (2002-10-01), Matsuyama et al.
patent: 6515731 (2003-02-01), Akimoto
patent: 6541170 (2003-04-01), Fukuda et al.
patent: 6722798 (2004-04-01), Senba et al.
patent: 6875281 (2005-04-01), Kitano et al.
patent: 6884298 (2005-04-01), Kitano et al.
patent: 7060115 (2006-06-01), Hashiguchi et al.
patent: 2005/0048421 (2005-03-01), Kitano et al.
patent: 2008/0020315 (2008-01-01), Higashi et al.
patent: 2001-85323 (2001-03-01), None

Affiliated with

Also associated with

Rating

Heat treatment apparatus, heat treatment method, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat treatment apparatus, heat treatment method, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treatment apparatus, heat treatment method, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4073592