Heat treatment apparatus having a wafer boat

Details Heat treatment apparatus having a wafer boat Heat treatment apparatus having a wafer boat

1993-04-23

1994-05-10

Yuen, Henry C.

Heating

Accessory means for holding, shielding or supporting work...

432258, 432259, F27D 500

Patent

active

053103394

ABSTRACT:
A heat treatment apparatus for transferring a semiconductor wafer between a cassette and a boat and heat-treating a number of wafers loaded on the boat, comprising wafer holding assembly for supporting the wafer, and a plurality of posts for supporting the wafer holding assembly at predetermined intervals. The wafer holding assembly includes a ring member having an outside diameter larger than the diameter of the wafer and supported at a part of a peripheral portion thereof by the posts, and a plurality of supporting pieces provided onto the ring member, for supporting the wafer directly in contact with the wafer.

REFERENCES:
patent: 2208734 (1940-07-01), Schreiber
patent: 3948594 (1976-04-01), Irwin, Jr.
patent: 4468259 (1984-08-01), Mimura
patent: 4504224 (1985-03-01), Hewitt
patent: 4636170 (1987-01-01), Stupka
patent: 4735220 (1988-04-01), Chandler
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 5131842 (1992-07-01), Miyazaki et al.

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