Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2005-07-26
2005-07-26
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C219S390000, C219S405000, C219S411000, C219S494000, C118S724000, C118S725000, C118S050100, C367S086000, C367S086000
Reexamination Certificate
active
06922522
ABSTRACT:
A heat treatment apparatus has a controller (100) provided with a temperature estimator (110) for estimating a temperature of a wafer by detection signals of temperature sensors (Sin, Sout) and a temperature calibrator (120) for correcting the estimated temperature of the wafer. In order to calibrate the temperature, an offset value stored in an offset table (122) is used. The offset value is determined based on the relationship between film-thickness of films formed in an experimental heat treatment process and process temperatures.
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Sakamoto Koichi
Suzuki Fujio
Wang Wenling
Yokota Takashi
Fuqua Shawntina
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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