Thermal measuring and testing – Thermal calibration system
Reexamination Certificate
2004-07-01
2009-08-18
Assouad, Patrick J (Department: 2862)
Thermal measuring and testing
Thermal calibration system
C374S137000, C432S241000
Reexamination Certificate
active
07575370
ABSTRACT:
The present invention provides precise temperature estimation in a heat treatment apparatus that estimates temperatures of process objects by using a thermal model and performs a heat treatment while performing a temperature control based on the estimated temperatures. The heat treatment apparatus (1) includes a processing vessel (11) accommodating plural wafers W, plural heaters (31to33) and plural temperature sensors (S1to S5), and stores the thermal model. The heat treatment apparatus 1 estimates temperatures of the wafers W based on outputs of the temperature sensors (S1to S5) by using the thermal model and controls the heaters (31to33) based on the estimated temperatures, applying a heat treatment to the wafers W. The thermal model for an individual apparatus is made by calibrating a standard thermal model designed for a standard apparatus. The standard model calibration is performed by heating an interior of the processing vessel (11), measuring the temperatures of the wafers W in the processing vessel (11), estimating the temperatures of the wafers W by using the thermal model, comparing the measured temperature and the estimated temperature, and calibrating the standard thermal model so that the measured temperature substantially coincides with the estimated temperature.
REFERENCES:
patent: 5498292 (1996-03-01), Ozaki
patent: 5517594 (1996-05-01), Shah et al.
patent: 6193506 (2001-02-01), Muka
patent: 6622104 (2003-09-01), Wang et al.
patent: 7139627 (2006-11-01), Obara et al.
patent: 2001/0054386 (2001-12-01), Saito
patent: 2002/0014483 (2002-02-01), Suzuki et al.
patent: 2002/0069025 (2002-06-01), Wang et al.
patent: 2004/0115585 (2004-06-01), Makiya et al.
patent: 1 189 261 (2002-03-01), None
patent: 59-108119 (1984-06-01), None
patent: 2002-025997 (2002-01-01), None
patent: 2002-124481 (2002-04-01), None
patent: 2002-130961 (2002-05-01), None
patent: 2002-141347 (2002-05-01), None
Notification of Transmittal of Copies of Translation of the International Preliminary Report on Patentability (Form PCT/IB/338)—PCT/JP2004/009326, dated Jan. 2004.
PCT International Preliminary Report on Patentability (Form PCT/IB/373)—PCT/JP2004/009326, dated Jan. 2004.
Translation of PCT Written Opinion of the International Searching Authority—(Form PCT/ISA/237)—PCT/JP2004/009326, dated Jan. 2004.
Kawamura Kazuhiro
Park Youngchul
Takenaga Yuichi
Adams Bret
Assouad Patrick J
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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