Heat treatment apparatus and method

Details Heat treatment apparatus and method Heat treatment apparatus and method

1996-02-26

1998-06-09

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 118725, C23C 1600, H05B 346, H05B 362, F27B 514

Patent

active

057638560

ABSTRACT:
A heat treatment apparatus comprising heat rays radiating means having a sheet-like heat rays radiating section, a process tube radiated and heated by heat rays shot from the sheet-like heat rays radiating section, and means for carrying a substrate, which has a surface of a semiconductor film and/or a dielectric film to be treated, into and out of the process tube, wherein said substrate is positioned to the sheet-like heat rays radiating section in the process tube in such a way that the incident angle of heat rays onto the peripheral portion of the treated surface of said substrate becomes smaller than 60.degree., so that heat rays absorptivity at the peripheral portion of said surface can be increased.

REFERENCES:
patent: 4486461 (1984-12-01), Ito et al.
patent: 4857689 (1989-08-01), Lee
patent: 4958061 (1990-09-01), Wakabayashi et al.
patent: 4981815 (1991-01-01), Kakoschke
patent: 5001327 (1991-03-01), Hirasawa et al.
patent: 5148714 (1992-09-01), McDiarmid
patent: 5156820 (1992-10-01), Wong et al.
patent: 5259883 (1993-11-01), Yamabe et al.
patent: 5429498 (1995-07-01), Okase et al.

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