Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Reexamination Certificate
2011-01-04
2011-01-04
Wilson, Gregory A (Department: 3749)
Heating
Work chamber having heating means
Having means by which work is progressed or moved mechanically
C414S935000, C118S729000
Reexamination Certificate
active
07862334
ABSTRACT:
A heat treatment apparatus and a heat treatment method using the same are disclosed. In the method, a support plate on which a device substrate is mounted is loaded into the heat treatment apparatus using a transfer unit in an in-line manner, and the device substrate mounted on the support plate is heat-treated using the heat treatment apparatus.
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Korean Notice of Allowability issued May 4, 2007, listing prior art references considered during prosecution.
Lee Ki-Yong
Park Byoung-Keon
Seo Jin-Wook
Yang Tae-Hoon
Knobbe Martens Olson & Bear LLC
Samsung Mobile Display Co., Ltd.
Wilson Gregory A
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