Heat treatment apparatus and heat treatment method

Details Heat treatment apparatus and heat treatment method Heat treatment apparatus and heat treatment method

2007-07-10

2007-07-10

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C257SE21529, C438S017000

Reexamination Certificate

active

10867712

ABSTRACT:
A reference value, which defines electric power to be supplied to a heating element, is generated. Deviation ΔT of temperature T1measured by a radiation thermometer from target temperature T0defined by a target temperature rising curve is determined. Compensation value is determined based on the deviation ΔT and the temperature T1. The reference value is multiplied by the compensation value. The heating element is supplied with electric power according to the corrected reference value.

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