Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1995-05-30
1996-12-24
Nelli, Raymond A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432253, 432258, 432 5, 432 6, F23D 312
Patent
active
055868800
ABSTRACT:
A heat treatment boat houses a plurality of semiconductor wafers in a manner separated at intervals for heat-treating the wafers in a heat treatment furnace. The heat treatment boat includes a bottom plate, a first support rod erected on the outer peripheral edge of the bottom plate, a second support rod and a third support rod both erected on the bottom plate so as to make an central angle of 105.degree. to 120.degree. with the first support rod with respect to the center of the respective wafer supported by the rods, and a top plate provided opposed to the bottom plate for holding the rods. The stresses applied to the wafers housed in the heat treatment boat are distributed equivalently to three contacting points with the rods and become the minimum.
REFERENCES:
patent: 4802842 (1989-02-01), Hirayama
patent: 4872554 (1989-10-01), Quernemoen
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5054418 (1991-10-01), Thompson et al.
patent: 5055036 (1991-10-01), Asane et al.
patent: 5297956 (1994-03-01), Yamabe et al.
patent: 5310339 (1994-05-01), Ushikawa
patent: 5316472 (1994-05-01), Niino et al.
Nelli Raymond A.
Tokyo Electron Limited
Tokyo Electron Tohoku Limited
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