Heat treatment apparatus and controller for heat treatment...

Details Heat treatment apparatus and controller for heat treatment... Heat treatment apparatus and controller for heat treatment...

2005-01-25

2005-01-25

Hoang, Tu (Department: 3742)

Electric heating

Heating devices

With power supply and voltage or current regulation or...

C219S494000, C219S506000

Reexamination Certificate

active

06847015

ABSTRACT:
Temperature control is made without the risk of contaminating object-to-be-processed and with high accuracy. Temperatures are metered out of contact with the objects-to-be-processed, and based on a metered result, estimated temperatures of the objects-to-be-processed are computed. Furthermore, estimation errors of the estimated temperatures are computed to correct the estimated temperatures. Based on a temperature recipe stating relationships between set temperatures and times and the corrected estimated temperatures, a heater is controlled.

REFERENCES:
patent: 5517594 (1996-05-01), Shah et al.
patent: 5895596 (1999-04-01), Stoddard et al.
patent: 6060697 (2000-05-01), Morita et al.
patent: 6175103 (2001-01-01), Lam et al.
patent: 09007963 (1997-01-01), None
patent: 10335340 (1998-12-01), None
patent: 200029526 (2000-01-01), None
patent: 2000077345 (2000-03-01), None

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