Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

1993-06-10

1994-12-06

Kastler, Scott

Metallurgical apparatus

Means treating solid metal

By contact with gas

118724, 4322542, C21D 106

Patent

active

053703715

ABSTRACT:
A heat treatment apparatus having a heat treatment boat with a plurality of wafers held thereon, which is to be loaded in a reaction vessel which has one end opened. Once loaded, the boat effects a seal of the reaction vessel, in preparation for subjecting the wafers to heat treatment. The boat also has a heat-insulator disposed on its lower end for heat-insulating the interior of the reaction vessel during the heat-treatment. The heat-insulator includes composite plates having a metal film layer on an upper surface for reflecting heat rays generated during the heat treatment of the reaction vessel, and a cylinder enclosing the composite plates. Thus, sufficient heat-insulating effect for the heat treatment can be obtained, and stable heat-treatment can be conducted with the sufficient heat-insulating effect secured. Furthermore, the generation of particles can be suppressed, and yields of the heat treatment can be improved.

REFERENCES:
patent: 4775317 (1988-10-01), Schulke et al.
patent: 4989543 (1991-02-01), Schmitt
patent: 5048800 (1991-09-01), Miyazaki et al.
patent: 5127365 (1992-07-01), Koyama et al.

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