Heating – With means diluting – purifying or burning exhaust gases
Reexamination Certificate
2006-05-16
2006-05-16
Wilson, Gregory (Department: 3749)
Heating
With means diluting, purifying or burning exhaust gases
C432S152000
Reexamination Certificate
active
07044731
ABSTRACT:
Exhaust pressure in an exhaust system15that evacuates a processing furnace2is determined as absolute pressure by using a differential manometer23,which measures the exhaust pressure as differential pressure, and a barometer, which measures atmospheric pressure as absolute pressure. An opening of a pressure regulating valve25is adjusted based on the absolute exhaust pressure thus determined so that pressure in the processing furnace2is regulated.
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International Preliminary Examination Report (PCT/IPEA/409) (translated) issue for PCT/JP2002/002711.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP2002/002711.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Wilson Gregory
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