Heat treatment apparatus

Heating – With means diluting – purifying or burning exhaust gases

Reexamination Certificate

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Details

C432S152000

Reexamination Certificate

active

07044731

ABSTRACT:
Exhaust pressure in an exhaust system15that evacuates a processing furnace2is determined as absolute pressure by using a differential manometer23,which measures the exhaust pressure as differential pressure, and a barometer, which measures atmospheric pressure as absolute pressure. An opening of a pressure regulating valve25is adjusted based on the absolute exhaust pressure thus determined so that pressure in the processing furnace2is regulated.

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patent: 5837903 (1998-11-01), Weigand
patent: 6187102 (2001-02-01), Yamamoto
patent: 6544034 (2003-04-01), Watanabe
patent: 2001/0029889 (2001-10-01), Holcomb et al.
patent: 2004/0007186 (2004-01-01), Saito
patent: 1 357 582 (2003-10-01), None
patent: 63-210501 (1988-09-01), None
patent: 05-013544 (1993-01-01), None
patent: 2001-201263 (2001-07-01), None
patent: WO 01/71781 (2001-09-01), None
International Preliminary Examination Report (PCT/IPEA/409) (translated) issue for PCT/JP2002/002711.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP2002/002711.

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