Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

2011-05-17

2011-05-17

Pelham, Joseph M (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S400000, C118S725000, C118S728000

Reexamination Certificate

active

07943886

ABSTRACT:
A heat treatment apparatus capable of ensuring a uniform temperature distribution on a substrate and reducing the generation of a sublimate includes a housing, a mounting table being arranged to move up and down within the housing, and a first heater being provided on the mounting table to heat a substrate placed on the mounting table, a second heater is provided on one side of the housing while an exhaust device is provided on the other side of the housing.

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patent: 10-012522 (1998-01-01), None
patent: 3324902 (2002-07-01), None
patent: 2003262469 (2003-09-01), None

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