Education and demonstration – Radio navigation – Simulation of upwardly directed airfield or landing approach...
Patent
1993-02-12
1995-04-18
Yuen, Henry C.
Education and demonstration
Radio navigation
Simulation of upwardly directed airfield or landing approach...
432156, 432 11, 432253, F27D 312
Patent
active
054073502
ABSTRACT:
A heat-treatment apparatus comprises a heat-treatment section for subjecting a heat-treatment to a wafer and a loading section for loading a wafer boat into and unloading it from the heat-treatment section. The loading section is connected to the heat-treatment section and includes in it a movable support member, a drive mechanism and a vertical base board as well as a load-lock chamber for maintaining the inside in vacuum. The movable support member supports a wafer boat. The movable support member is attached to a vertical base board so that it can move up and down. The drive mechanism is attached on the major surface of the vertical base board opposite to the surface facing the wafer boat. The drive mechanism drives the movable support to move up and down. The heat-treatment apparatus further comprises a wafer transfer section that includes an orientation flat alignment mechanism and a buffer stage disposed near the orientation flat alignment mechanism. The wafer transfer section includes a wafer cassette means, a buffer stage and a wafer transfer robot for transferring wafers between the orientation flat alignment mechanism and the wafer boat.
REFERENCES:
patent: 5116784 (1992-05-01), Ushikawa
patent: 5207578 (1993-05-01), Sakata
patent: 5271732 (1993-12-01), Yokokawa
patent: 5273423 (1993-12-01), Shiraiwa
Iwabuchi Katsuhiko
Kagatsume Satoshi
Shiraiwa Hirotsugu
Suzuki Takeo
Tozawa Takashi
Kabushiki Kaisha Yaskawa Denki
Tokyo Electron Limited
Tokyo Electron Sagami Limited
Yuen Henry C.
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