Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1998-02-13
1999-12-28
Hoang, Tu Ba
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219407, 373127, 373130, F27B 514, H05B 366
Patent
active
060084774
ABSTRACT:
A helical heating wire is disposed so as to surround a reaction tube, and is held by a heat insulating structure. Support members are arranged at predetermined pitches on the inner circumference of the heat insulating structure to support the heating wire on the inner circumference of the heat insulating structure so as to enable the heating wire to make thermal expansion and thermal contraction. Fixing means are attached to one loop out of every suitable number of loops of the helical heating wire to fix the heating wire to the heat insulating structure.
Kobayashi Makoto
Nakao Ken
Osanai Hisaei
Hoang Tu Ba
Tokyo Electron Limited
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