Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

1991-10-18

1994-06-28

Reynolds, Bruce A.

Electric heating

Heating devices

With heating unit structure

219385, 219395, 219536, 338316, 392416, 392418, H05B 364, F27B 516

Patent

active

053249208

ABSTRACT:
The heat treatment apparatus according to the invention comprising a process tube for holding a plurality of semiconductor wafers, a heating resistive element made mainly of molybdenum silicide and surrounding the process tube, a heat insulating member surrounding the heating resistive element and having a layer which made of material inert to silicon dioxide and faces the surface of the heating resistive element, and a securing member securing the heating resistive element to the heat insulating member, and made of material inert to silicon dioxide.

REFERENCES:
patent: 3373239 (1968-03-01), Rubisch
patent: 3912905 (1975-10-01), Giler
patent: 4262192 (1981-04-01), Giler
patent: 4296311 (1981-10-01), Hagglund
patent: 4450343 (1984-05-01), Dundon
patent: 4894515 (1990-01-01), Hurko
patent: 4950870 (1990-08-01), Mitsuhashi
patent: 5001327 (1991-03-01), Hirasawa et al.

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