Heat-treating methods and systems

Details Heat-treating methods and systems Heat-treating methods and systems

2005-09-06

2005-09-06

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S418000, C392S423000, C392S424000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000

Reexamination Certificate

active

06941063

ABSTRACT:
A method involves pre-heating a workpiece to an intermediate temperature, heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, and enhancing cooling of the workpiece. Enhancing cooling may involve absorbing radiation thermally emitted by the workpiece. An apparatus includes a first heating source for heating a first surface of a semiconductor wafer, a second heating source for heating a second surface of the semiconductor wafer, and a first cooled window disposed between the first heating source and the semiconductor wafer.

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