Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1991-09-27
1992-12-15
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
F27B 514
Patent
active
051719720
ABSTRACT:
A heat treating furnace has a reaction tube for accommodating an object to be treated, a heating device arranged to surround the reaction tube, a heat-insulating member arranged outside the heating device, a tubular member arranged outside the heat-insulating member, and a coolant circulating pipe arranged in a space between the tubular member and the heat-insulating member. According to the heat treating furnace of the present invention, a heat treatment can be performed while accurately performing temperature control.
REFERENCES:
patent: 3240915 (1966-03-01), Carter
patent: 3387078 (1968-06-01), Montgomery
patent: 3972682 (1976-08-01), Stephens
patent: 4167914 (1979-09-01), Toole
patent: 4699084 (1987-10-01), Wilson
Tokyo Electron Sagami Limited
Walberg Teresa J.
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