Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate
2006-11-28
2006-11-28
Hoang, Tu (Department: 2832)
Electric heating
Heating devices
With power supply and voltage or current regulation or...
C219S412000
Reexamination Certificate
active
07141765
ABSTRACT:
A antireflective film50is formed on a thermocouple42arranged in a processing vessel1of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple42. In a typical embodiment, the thermocouple42is made by connecting a platinum wire43A and a platinum-rhodium alloy wire43B, and the antireflective film50is composed by stacking a silicon nitride layer50C, silicon layer50B and a silicon nitride layer50A in that order.
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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP02/02710.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338).
Dip Anthony
Eickmann Karuki
Kaushal Sanjeev
Makiya Toshiyuki
O'meara David L.
Hoang Tu
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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