Heat treating device

Electric heating – Heating devices – With power supply and voltage or current regulation or...

Reexamination Certificate

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Details

C219S412000

Reexamination Certificate

active

07141765

ABSTRACT:
A antireflective film50is formed on a thermocouple42arranged in a processing vessel1of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple42. In a typical embodiment, the thermocouple42is made by connecting a platinum wire43A and a platinum-rhodium alloy wire43B, and the antireflective film50is composed by stacking a silicon nitride layer50C, silicon layer50B and a silicon nitride layer50A in that order.

REFERENCES:
patent: 567689 (1896-09-01), Reilly et al.
patent: 5066615 (1991-11-01), Brady et al.
patent: 6077777 (2000-06-01), Ha
patent: 0 274 077 (1988-07-01), None
patent: 07-181085 (1995-07-01), None
patent: 11224130 (1999-08-01), None
International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP02/02710.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338).

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