Heat treating device

Details Heat treating device Heat treating device

2011-08-23

2011-08-23

Campbell, Thor S (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S407000, C392S416000, C392S419000, C392S420000

Reexamination Certificate

active

08005352

ABSTRACT:
A heat treating device including a treatment room for accommodating therein a substrate, a plurality of light sources, which is disposed above the treatment room, for irradiating the substrate, a first reflector, whose inner surface is a reflective surface of a dome shape, for reflecting and directing a part of light emitted from each light source to the substrate, and a plurality of second reflectors, each of which is provided for each light source, for reflecting and focusing light emitted from each light source and directing it to the substrate. The reflective surface of each of the second reflectors is a part of a spheroidal surface or a curved surface approximate to it surrounding a first focal point in such a manner that the first focal point is formed at a position near each light source and a second focal point is formed on a side of the substrate.

REFERENCES:
patent: 6636308 (2003-10-01), Tsutsui et al.
patent: 1279763 (2001-01-01), None
patent: 4 297581 (1992-10-01), None
patent: 7 201753 (1995-08-01), None
patent: 7 245274 (1995-09-01), None

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