Electric resistance heating devices – Heating devices – Radiant heater
Patent
1991-09-17
1993-07-13
Reynolds, Bruce A.
Electric resistance heating devices
Heating devices
Radiant heater
219494, 364557, 118724, 118719, 118712, 374166, 374179, A21B 200, F26B 1900
Patent
active
052281140
ABSTRACT:
A heat-treating apparatus which heat-treats a multiple of objects such as a plate or the like, with a batch scheme. A reaction chamber houses the multiple of the objects to be treated. An electrical heater is provided outside of the reaction chamber for heat-treating the multiple of objects to be treated at a predetermined temperature. A temperature detector detects a temperature within the reaction chamber and has main and reserve temperature detectors. A damage detector detects damage to the main and reserve temperature detectors. A controller controls the electrical heater normally in accordance with a detection output from the main temperature detector of the temperature detector. When the damage of the main temperature detector is detected by the damage detector, the controller controls the electrical heater in accordance with a detection output from the reserve temperature detector of the temperature detector.
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Jeffery John A.
Reynolds Bruce A.
Tokyo Electron Sagami Limited
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