Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-12-19
2006-12-19
Paik, Sang (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S482000
Reexamination Certificate
active
07151239
ABSTRACT:
A heat treating apparatus is provided to apply a heat treatment on a substrate. Prior to the heat treatment, an exclusive transfer mechanism transfers the substrate from a cooling plate onto a heating plate for heating the substrate. Before mounting the substrate on the heating plate, the control mode for heater modules for heating the heating plate on power supply module is switched from a PID control by a regulating part in a controller of the apparatus to a MV control by a fixed-pattern output part in the controller. Next, at a predetermined timing since the substrate has been mounted on the heating plate, the MV control is switched to the PID control. Consequently, it becomes possible to quickly restore a reduce temperature of the heating plate prior to the mounting of substrate on the heating plate and also possible to quickly stabilize a so-raised temperature of the heating plate, accomplishing a heating process with high accuracy and shirt time. Accordingly, when it is required to perform a designated heat treatment on condition that a substrate is mounted on the heating plate whose temperature is stabilized to a processing temperature as a target, the heat treatment with high accuracy can be accomplished in a short time.
REFERENCES:
patent: 6222161 (2001-04-01), Shirakawa et al.
patent: 6461438 (2002-10-01), Ookura et al.
patent: 6469283 (2002-10-01), Burkhart et al.
patent: 6644965 (2003-11-01), Ookura et al.
patent: 7049553 (2006-05-01), Shigetomi et al.
patent: 11-74187 (1999-03-01), None
Computer-generated translation of JP11-74187.
Kaneda Masatoshi
Takei Toshichika
Paik Sang
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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