Heat-treating apparatus and heat-treating method

Details Heat-treating apparatus and heat-treating method Heat-treating apparatus and heat-treating method

2008-06-10

2008-06-10

Kastler, Scott (Department: 1793)

Metallurgical apparatus

Means treating solid metal

By contact with gas

C438S758000

Reexamination Certificate

active

07384595

ABSTRACT:
A heat-treating apparatus comprises a table having a heating element buried therein, a plate-like target object to be processed being disposed on the table so as to be heated to a prescribed temperature, a support member for supporting the target object and movable in the vertical direction relative to the table such that the support member is moved to permit the target object supported by the support member to be disposed on the table or is moved away from the table, a cover surrounding the upper portion of the table, and a casing surrounding the lower portion of the table and combined with the cover so as to form a process chamber. When the process chamber is opened, the support member permits the target object to be housed inside the cover.

REFERENCES:
patent: 5620560 (1997-04-01), Akimoto et al.
patent: 6097005 (2000-08-01), Akimoto
patent: 6246030 (2001-06-01), Matsuyama
patent: 6462310 (2002-10-01), Ratliff et al.
patent: 6590186 (2003-07-01), Tanaka et al.
patent: 6605550 (2003-08-01), Nagashima

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