Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1996-05-06
1998-11-10
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219 39D, 392418, 392416, C23C 1600
Patent
active
058347372
ABSTRACT:
The present invention is a heat treating apparatus, including a support plate having an object to be treated disposed thereon, heating member for heating the object through the support plate, and support pins extending through the support plate so as to support the object, wherein the support plate is provided with holes each sized large enough to permit a horizontal movement of the support pin, and the support pin is movable in a horizontal direction within the hole made in the support plate. The present invention also is a heat treating apparatus, including a support plate arranged within a treating chamber and having an object to be treated disposed thereon, heating member for heating the object through the support plate, a cover member arranged in the treating chamber to define a treating space between the support plate and the cover member, a shutter member partitioning the treating space and capable of opening/closing the partitioned treating space, and a gap setting member disposed between the cover member and the shutter member.
REFERENCES:
patent: 4503807 (1985-03-01), Nakayama et al.
patent: 4705951 (1987-11-01), Layman et al.
patent: 5016332 (1991-05-01), Reichelderfer et al.
patent: 5366002 (1994-11-01), Tepman
patent: 5665167 (1997-09-01), Deguchi et al.
patent: 5669977 (1997-09-01), Shufflebotham et al.
Hirose Osamu
Tateyama Kiyohisa
Pelham J.
Tokyo Electron Limited
Walberg Teresa J.
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