Heating – Work chamber having heating means – Work chamber having gaseous material supply or removal...
Patent
1988-11-25
1990-07-24
Yuen, Henry C.
Heating
Work chamber having heating means
Work chamber having gaseous material supply or removal...
432241, 432242, 432 6, F27D 312, F27B 504
Patent
active
049432354
ABSTRACT:
A heat-treating apparatus comprises a heat-treating furnace which include a process tube arranged so as to set its longitudinal direction vertically and having inlet and exhaust ports for a reaction gas, a heater arranged around the process tube, a capping member for capping an opening for allowing an heat-treating object to be loaded therethrough, which is formed in the lower end of the process tube, a case for covering a portion between the process tube and the capping member, and an exhaust nozzle, coupled to the the exhaust port formed in the process tube, for introducing the exhaust waste gas to the outside of the heat-treating apparatus. An exhaust nozzle is arranged in the case so as to introduce the waste gas leaking from between the process tube and the capping member to the outside of the heat-treating apparatus, thereby preventing the leaked gas from being diffused around the heat-treating apparatus.
REFERENCES:
patent: 4596526 (1986-06-01), Soliman
patent: 4610628 (1986-09-01), Mizushina
patent: 4613305 (1986-09-01), Sakurai
patent: 4738618 (1988-04-01), Massey et al.
patent: 4775317 (1988-10-01), Schulke et al.
Nakao Ken
Ohkase Wataru
Sato Seishiro
Tel Sagami Limited
Yuen Henry C.
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