Heating – Heating or heat retaining work chamber structure – Door – cover or port
Patent
1993-09-22
1994-07-12
Yuen, Henry C.
Heating
Heating or heat retaining work chamber structure
Door, cover or port
432241, 432 5, 432 6, F27D 312
Patent
active
053283600
ABSTRACT:
A heat-treating apparatus comprises a heat-treating portion which performs a required heat treating to a plural number of objects to be treated mounted on a heat-treating boat, a vacuum exhaust system which creates a vacuum inside the heat-treating portion, a load lock chamber which is connected so as to be freely openable and closable with respect to the heat-treating portion, which is filled therein with an inert gas and which is for transporting an object to be treated into and out of the heat-treating portion, and a residual treating gas exhaust system which is connected to the load lock chamber. Furthermore, in this heat-treating apparatus, there are also provided an oxygen concentration detector for detecting an oxygen concentration inside the load lock chamber, a door lock device provided in a vicinity of a maintenance door of the load lock chamber and which regulates opening and closing of the maintenance door, and a door lock control device which releases a lock of the door lock device when the oxygen concentration detector has detected a required oxygen concentration.
REFERENCES:
patent: 3778221 (1973-12-01), Bloom
patent: 4692115 (1987-09-01), Aldridge et al.
patent: 4954079 (1990-09-01), Yamaga et al.
patent: 4979897 (1990-12-01), Yates
patent: 5055036 (1991-10-01), Asano et al.
patent: 5221201 (1993-06-01), Yamaga et al.
Tokyo Election Sagami Kabushiki Kaisha
Yuen Henry C.
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