Coating processes – Electrical product produced – Metal coating
Patent
1993-03-29
1994-10-18
Beck, Shrive
Coating processes
Electrical product produced
Metal coating
4271261, 4271264, 4272551, 427405, 4274197, 427529, 427530, C23C 1600
Patent
active
053566610
ABSTRACT:
A heat transfer insulated part including a heat transfer substrate formed of a sintered metal of Cu-W or Cu-Mo, an insulating ceramic layer for electrically insulating the heat transfer substrate, formed of ceramic such as Al.sub.2 O.sub.3, SiO.sub.2 and Si.sub.3 N.sub.4, and a barrier layer provided between the heat transfer substrate and an insulating ceramic layer composed of at least either one of metal layers of W and Mo. Furthermore, preferably, an intermediate layer composed of titanium carbide and/or titanium nitride and so forth for enhancing the adhesive property between the insulating ceramic layer and the barrier layer is provided.
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M. Fukutomi et al "Silicon Nitride Coatings on Molybdenum by RF Reactive Ion Plating". J. Electrochem. Soc. vol. 124, No. 9 Sep. 1977, pp. 1420-1424.
M. Kobayashi et al "TiN and TiC Coating on Cemented Carbides by Ion Plating" Thin Solid Films 54, 1978, pp. 67-74.
Doi Akira
Kawai Hiromu
Yamanaka Shosaku
Beck Shrive
Dang Vi Duong
Fasse W. F.
Fasse W. G.
Sumitomo Electric Industries Ltd.
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