Heat system, heat method, and program

Details Heat system, heat method, and program Heat system, heat method, and program

2011-03-01

2011-03-01

Wilson, Gregory A (Department: 3749)

Heating

Heating or heat retaining work chamber structure

C432S051000, C427S008000, C427S009000, C700S121000

Reexamination Certificate

active

07896649

ABSTRACT:
The present invention provides a heating system, a heating method and a program, which can readily control processing temperature. A temperature calculating computer4of the heating system includes a device DB42. The device DB42stores therein a temperature correcting table indicative of a relationship between an accumulated film thickness of extraneous matter attached to the interior of each heating apparatus and a temperature correcting amount, with respect to each heating apparatus, for each temperature (processing temperature) in the heating apparatus. Thus, the temperature correcting amount can be specified based on the temperature correcting table, the processing temperature and the accumulated film thickness, so that an optimized value can be calculated from the specified temperature correcting amount.

REFERENCES:
patent: 2002/0045146 (2002-04-01), Wang et al.
patent: 2007/0074660 (2007-04-01), Park et al.
patent: 2008/0213716 (2008-09-01), Koyama et al.
patent: 2008/0311297 (2008-12-01), Hatano et al.
patent: 2009/0117259 (2009-05-01), Kataoka et al.
patent: 2003-109906 (2003-04-01), None

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