Heat stabilized sub-stoichiometric dielectrics

Details Heat stabilized sub-stoichiometric dielectrics Heat stabilized sub-stoichiometric dielectrics

2011-08-09

2011-08-09

Xu, Ling (Department: 1784)

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

C428S701000, C428S913000, C427S372200, C427S383100, C427S162000

Reexamination Certificate

active

07993744

ABSTRACT:
A sub-stoichiometric oxide, nitride or oxynitride layer in an optical stack, alone or in direct contact with one or two stabilizing layers, stabilizes the optical properties of the stack. The stabilizing layer(s) can stabilize the chemistry and optical properties of the sub-stoichiometric layer during heating. The change in optical characteristics of the sub-stoichiometric layer upon heating can counter the change in optical characteristics of the rest of the optical stack.

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