Heat-sensitive flow sensor

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

Patent

active

051487071

ABSTRACT:
In a heat-sensitive flow sensor including a bridge circuit composed of a heat-sensitive resistor formed on a substrate provided within a fluid flow passage and a plurality of resistors and a control circuit for controlling current supplied to the heat-sensitive resistor to maintain the bridge circuit in a thermally balanced condition, a flow rate being detected from the thermal balance condition of the bridge circuit, current supply leads and a base portion of the substrate are buried in a heat insulating support member supported by a base. Preferably, lead terminals of the heat-sensitive resistor formed on the base portion are also buried in the heat insulating support member.

REFERENCES:
patent: 4366704 (1983-01-01), Sato et al.
patent: 4393697 (1983-07-01), Sato et al.
patent: 4803875 (1989-02-01), Kuhn et al.
patent: 4805452 (1989-02-01), Eiermann et al.
patent: 4823462 (1989-04-01), Huber
patent: 4870860 (1989-10-01), Ohta et al.

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