Heat retaining tube for use in a semiconductor wafer heat proces

Details Heat retaining tube for use in a semiconductor wafer heat proces Heat retaining tube for use in a semiconductor wafer heat proces

1997-07-24

1999-01-12

Vinson, Brian N.

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

1303

Patent

active

D04040163

REFERENCES:
patent: D361752 (1995-08-01), Yamaga
patent: 4857689 (1989-08-01), Lee
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5314574 (1994-05-01), Takahashi
patent: 5407449 (1995-04-01), Zinger
patent: 5516732 (1996-05-01), Flegal
patent: 5658115 (1997-08-01), Yamazaki et al.
patent: 5752796 (1998-05-01), Muka

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