Heat processing device with hot plate and associated reflector

Details Heat processing device with hot plate and associated reflector Heat processing device with hot plate and associated reflector

1999-01-11

2000-07-11

Jeffery, John A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219405, 2194441, 2194682, 392418, 118725, H01L 2127, H01L 21324

Patent

active

060876328

ABSTRACT:
A heat processing device includes a hot plate on which a substrate is placed, a heater press-fitted in the hot plate for heating the substrate through the hot plate, and a reflecting plate facing an underside and side faces of the hot plate at a distance therefrom for reflecting heat radiated from the hot plate. An outside frame is arranged on the surface of the hot plate so as to surround the substrate.

REFERENCES:
patent: 3836751 (1974-09-01), Anderson
patent: 5462603 (1995-10-01), Murakami
patent: 5467220 (1995-11-01), Xu
patent: 5635093 (1997-06-01), Arena et al.
patent: 5834737 (1998-11-01), Hirose et al.
patent: 5844205 (1998-12-01), White et al.

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