Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate
2006-03-28
2006-03-28
Ciric, Ljiljana (Department: 3753)
Heat exchange
With timer, programmer, time delay, or condition responsive...
Having heating and cooling capability
C165S206000, C165S263000, C165S080500, C219S444100, C118S724000, C156S345520, C156S345530
Reexamination Certificate
active
07017658
ABSTRACT:
A heating unit having a heat pipe structure includes a heater and a cooling pipe disposed in an inner space of a holding table. The holding table and the cooling pipe are thermally insulated by a heat-insulating member, so that it is possible to prevent direct heat transfer from the cooling pipe to the holding table. Therefore, it is possible to rapidly perform a cooling processing while keeping the evenness of the temperature distribution of the mounting face and the temperature distribution of the substrate mounted on the mounting face, and consequently to appropriately keep the evenness of the film thickness and the line width of a wiring layer formed on the substrate upon heat processing.
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Hisai Akihiro
Yoshida Jun-ichi
Ciric Ljiljana
Dainippon Screen Mfg. Co,. Ltd.
Ostrolenk Faber Gerb & Soffen, LLP
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