Heat processing apparatus utilizing a plurality of stacked heate

Electric resistance heating devices – Heating devices – Radiant heater

Patent

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Details

219532, 219542, 373110, 338318, 338321, 174150, 174138J, 174163R, 118725, H01L 2122, F27D 1102

Patent

active

051877716

ABSTRACT:
A heat processing apparatus comprises a reactor tube in which matters to be processed are housed, a wire-shaped heating unit enclosing the reactor tube, a support device for supporting the heating unit at plural positions, and reinforcing members for reinforcing the support device. The support device includes plurality of holders stacked one upon the others, each of the holders has recesses on those two faces thereof which are contacted with faces of its adjacent ones, and when the holders are stacked one upon the others in a pole, the recesses of the two adjacent holders stacked form a hole through which the heating unit is passed. The support device has support members each supporting a pole of the holders stacked and each of the holders is engaged with its corresponding support member.

REFERENCES:
patent: 635133 (1899-10-01), Gold
patent: 1649925 (1927-11-01), Ruckstahl
patent: 3395241 (1968-07-01), Roman
patent: 4849608 (1989-07-01), Muraoka et al.
patent: 5095192 (1992-03-01), McEntire et al.

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