Heat processing apparatus of vertical type

Details Heat processing apparatus of vertical type Heat processing apparatus of vertical type

1992-02-06

1993-05-04

Yuen, Henry C.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432253, 432152, 432153, F27D 312

Patent

active

052075788

ABSTRACT:
A heat processing apparatus of the vertical type includes a box which has a process tube in the upper half thereof and a space in the lower half thereof. A cap for the process tube can be moved up and down between an upper position where the cap closes the process tube while holding a wafer boat on it and a lower position in the space where it opens the process tube. Clean air is supplied into the space through a dust removing filter located on one side of the space and exhausted from the space through the other side of the space. The air thus exhausted is collected by a gas processing system, which serves to remove harmful components from the air thus collected. A scavenger is arranged enclosing the open bottom of the process tube. Gas remaining in the process tube after the heat process is sucked by the scavenger and collected by another gas processing system.

REFERENCES:
patent: 4610628 (1986-09-01), Mizushina
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 4976613 (1990-12-01), Watanabe
patent: 4981436 (1991-01-01), Watanabe

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