Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate
2008-04-11
2010-12-28
Kasenge, Charles R (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Optimization or adaptive control
C700S037000, C700S300000, C219S494000
Reexamination Certificate
active
07860585
ABSTRACT:
A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.
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Japanese Office Action issued on Apr. 7, 2009 for Japanese Patent Application No. 2007-106247 with English translation.
Inoue Hisashi
Kanda Shoichi
Takahashi Goro
Wang Wenling
Kasenge Charles R
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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