Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-08-14
2010-11-16
Bahta, Kidest (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S300000
Reexamination Certificate
active
07835816
ABSTRACT:
In a vertical-type heat processing apparatus, it is intended to stabilize the temperature of an inner wall of the reaction vessel upon loading as well as to reduce particle contamination, for example, by suppressing peeling of films attached to the inner wall. An inner wall temperature sensor is attached, in advance, to the inner wall of the reaction vessel, so as to obtain each time series data of detection values of the inner wall temperature sensor and a command value of power to be supplied to heating means. The inner wall temperature is predicted from the command value of the power obtained just before, based on the data, during an initial time of loading, so as to use the predicted value of the inner wall temperature as an object to be controlled. Thereafter, around the end time of loading, the object to be controlled is gradually changed into a temperature detection value of a temperature detecting section provided outside the reaction vessel, so as to be completely changed over time into the temperature detection value.
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Kataoka Yuki
Yukio Tojo
Bahta Kidest
Smith, Cambrell & Russell, LLP
Tokyo Electron Limited
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