Heat processing apparatus, heat processing method, computer...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C700S300000

Reexamination Certificate

active

07835816

ABSTRACT:
In a vertical-type heat processing apparatus, it is intended to stabilize the temperature of an inner wall of the reaction vessel upon loading as well as to reduce particle contamination, for example, by suppressing peeling of films attached to the inner wall. An inner wall temperature sensor is attached, in advance, to the inner wall of the reaction vessel, so as to obtain each time series data of detection values of the inner wall temperature sensor and a command value of power to be supplied to heating means. The inner wall temperature is predicted from the command value of the power obtained just before, based on the data, during an initial time of loading, so as to use the predicted value of the inner wall temperature as an object to be controlled. Thereafter, around the end time of loading, the object to be controlled is gradually changed into a temperature detection value of a temperature detecting section provided outside the reaction vessel, so as to be completely changed over time into the temperature detection value.

REFERENCES:
patent: 4957588 (1990-09-01), Koshiba et al.
patent: 5380485 (1995-01-01), Takahashi et al.
patent: 6402844 (2002-06-01), Harada et al.
patent: 6946167 (2005-09-01), Hosoi et al.
patent: 7135659 (2006-11-01), Ejima
patent: 7217670 (2007-05-01), van Kesteren
patent: 2004/0087185 (2004-05-01), Ejima
patent: 2007/0074660 (2007-04-01), Park et al.
patent: 2005-159317 (2005-06-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Heat processing apparatus, heat processing method, computer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat processing apparatus, heat processing method, computer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat processing apparatus, heat processing method, computer... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4244651

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.